今天給大家介紹一下工業廢水處理工程工藝技術方法中半導體含氟廢水是如何產生的

半導體(ti)行業制造工(gong)藝(yi)龐(pang)雜，工(gong)藝(yi)步驟高(gao)達上百余步，同時運用多(duo)種化(hua)(hua)(hua)學(xue)試劑(ji)和特別(bie)氣體(ti)。重要生產工(gong)序包含：硅片(pian)清洗(xi)、氧化(hua)(hua)(hua)÷分散、化(hua)(hua)(hua)學(xue)氣相(xiang)沉積（CVD）、光刻、去膠(jiao)、干法(fa)刻蝕（DE）、濕法(fa)侵(qin)蝕（ WE）、離子(zi)化(hua)(hua)(hua)、金屬化(hua)(hua)(hua)（濺射鍍膜(mo)PVD、電(dian)鍍銅）、化(hua)(hua)(hua)學(xue)機(ji)械拋(pao)光CMP檢(jian)測(ce)。其中刻蝕工(gong)序等運用氫氟酸、氟化(hua)(hua)(hua)銨及(ji)用高(gao)純水清洗(xi)，這就是含氟廢水的(de)起源。

含氟(fu)廢水，對(dui)人體的粘膜、上呼(hu)吸道眼睛、皮膚組織有極(ji)強的損壞作用。吸入后(hou)可因喉(hou)及(ji)支(zhi)氣(qi)管的炎癥、水腫(zhong)痙攣(luan)及(ji)化(hua)學性肺炎、肺氣(qi)腫(zhong)而(er)致逝世。中(zhong)毒體現有燒灼感、咳(ke)嗽、喘息(xi)喉(hou)炎、氣(qi)短、頭痛惡(e)心(xin)和嘔吐。所(suo)以處理好(hao)半導體行業中(zhong)含氟廢水變(bian)得(de)十分重要。

想了(le)解更多(duo)信息可登陸官網，依斯(si)倍環(huan)保作為專業工(gong)(gong)(gong)(gong)業廢(fei)(fei)(fei)水(shui)(shui)處(chu)理工(gong)(gong)(gong)(gong)程廠家,擁有(you)38年歐洲環(huan)保工(gong)(gong)(gong)(gong)業廢(fei)(fei)(fei)水(shui)(shui)處(chu)理工(gong)(gong)(gong)(gong)程服務(wu)經驗(yan)，專注于工(gong)(gong)(gong)(gong)業廢(fei)(fei)(fei)水(shui)(shui)處(chu)理工(gong)(gong)(gong)(gong)藝,工(gong)(gong)(gong)(gong)業廢(fei)(fei)(fei)水(shui)(shui)處(chu)理方法,工(gong)(gong)(gong)(gong)業廢(fei)(fei)(fei)水(shui)(shui)處(chu)理技術等高濃度(du)高難度(du)工(gong)(gong)(gong)(gong)業廢(fei)(fei)(fei)水(shui)(shui)處(chu)理。

【文章來源：工(gong)業廢水處理工(gong)藝方法】